Material sputter target | monolithic | bonded | Chem. formula | Purity (%) | Density (g/cm³) | Melting point (°C) | Atomic weight (u) | ||
---|---|---|---|---|---|---|---|---|---|
planar | Tube | planar | Tube | ||||||
Aluminium | • | • | Al | 99.5 - 99.999 | 2.7 | 660 | 26.98 | ||
Antimony | • | Sb | 99.9 | 6.68 | 630 | 121.75 | |||
Chrome | • | • | • | Cr | 99.5-99.99 | 7.19 | 1907 | 51.99 | |
Cobalt | • | • | Co | 99.9 | 8.92 | 1495 | 58.93 | ||
Iron | • | • | Fe | 99.9 | 7.87 | 1538 | 55.84 | ||
Germanium | • | Ge | 99.99-99.999 | 5.32 | 937 | 72.91 | |||
Hafnium | • | • | • | Hf | 99.9 | 13.31 | 2227 | 173.49 | |
Indium | • | In | 99.9-99.99 | 7.31 | 156 | 114.82 | |||
Copper | • | • | Cu | 99.9-99.99 | 8.94 | 1083 | 83.54 | ||
Magnesium | • | • | Mg | 99.9 | 1.74 | 650 | 24.3 | ||
Manganese | • | Mn | 99.9 | 7.3 | 1246 | 54.93 | |||
Molybdenum | • | • | • | • | Mo | 99.9 | 10.22 | 2623 | 95.94 |
Nickel | • | • | Ni | 99.9 | 8.9 | 1455 | 58.69 | ||
Niobium | • | • | • | • | Nb | 99.9 | 8.57 | 2477 | 95.94 |
Rhenium | • | • | Re | 99.9 | 21.02 | 3180 | 186.21 | ||
Scandium | • | • | Sc | 99.9 | 2.99 | 1541 | 44.95 | ||
Selenium | • | Se | 99.95 | 4.28 | 217 | 78.96 | |||
Tantalum | • | • | • | Ta | 99.9 | 16.69 | 2996 | 180.94 | |
Titanium | • | • | • | Ti | 99.7-99.99 | 4.5 | 1648 | 47.88 | |
Vanadium | • | • | • | V | 99.9 | 6.11 | 1910 | 50.94 | |
Tungsten | • | • | • | W | 99.9 | 19.3 | 3410 | 183.85 | |
Yttrium | • | • | Y | 99.9 | 4.47 | 1522 | 89.9 | ||
Zircon | • | • | Zr | 99.9 | 6.5 | 1855 | 91.22 | ||
Zinc | • | • | Zn | 99.9-99.99 | 7.14 | 419 | 65.38 | ||
Tin | • | • | Sn | 99.95 | 7.31 | 231 | 118.71 |
Material sputter target | planar monol. | planar bonded | Chemical formula | Purity (%) | Density (g/cm³) | Melting point (°C) | Atomic weight (u) |
---|---|---|---|---|---|---|---|
Gold | • | • | Au | 99.9-99.99 | 19.32 | 1064 | 196.96 |
Gold / Copper | • | • | Au / Cu | ||||
Iridium | • | • | Ir | 99.9 | 22.65 | 2450 | 192.22 |
Platinum | • | • | Pt | 99.9 | 21.45 | 1768 | 195.08 |
Palladium | • | • | Pd | 99.9 | 12.02 | 1554 | 106.42 |
Ruthenium | • | • | Ru | 99.9 | 1245 | 2334 | 101.07 |
Rhodium | • | • | Rh | 99.9 | 12.41 | 1966 | 102.9 |
Silver | • | • | Ag | 99.9-99.99 | 10.5 | 961 | 107.96 |